HIGH SENSITIVITY GAS ANALYZER

摘要

PROBLEM TO BE SOLVED: To enhance the detection sensitivity and measuring precision of a target gas in a gas analyzer for determinating a very small amount of the gas contained in the atmosphere or the like. SOLUTION: The gas analyzer is used so as to repeatedly determinate a very small amount of the gas contained in the atmosphere or the like and constituted of a gas flow channel for allowing the gas to be measured in a pulsative manner, a quadrupole type mass analyzer with a vacuum exhaust device and an orifice for allowing a part of the gas to be measured to flow in the ion source of the quadrupole type mass analyzer from the intermediate part of the gas flow channel. This gas analyzer is sharply improved in the detection sensitivity and measuring precision of a target gas by repeatedly reproducing the pulse shape of the flow of the gas to be measured and preventing an adsorbable gas such as steam or the like from being adsorbed on the pipe wall or electrode of the quadrupole type mass analyzer. COPYRIGHT: (C)2006,JPO&NCIPI