摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal display element and its fabrication method capable of reducing the number of masks to be used for fabrication of a thin film transistor. SOLUTION: The method includes steps of: forming an active layer having a source region, a drain region and a channel region on a first substrate and forming a first insulating layer thereon; forming a first conductive layer and a second conductive layer on the first insulating layer and forming a gate electrode, a gate line and a pixel electrode by patterning the above conductive layers; forming a second insulating layer thereon, forming a contact hole in the source/drain portion of the first and second insulating layers and removing the second insulating layer of the upper portion of the pixel electrode; forming a third conductive layer thereon, forming source/drain electrodes to be electrically connected to the source/drain regions through the contact hole by patterning the third conductive layer, and exposing the second conductive layer of the upper portion of the pixel electrode; and forming a liquid crystal layer between the first substrate and the second substrate. COPYRIGHT: (C)2006,JPO&NCIPI |