| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump which overcomes the drawbacks of conventional technology and has remarkably high exhaust speed. SOLUTION: The vacuum pump (1) has a flange (2); at least two gas inlet openings (4), at least one gas outlet opening (5); at least two rotor shafts (6), at least one lower part (9) of a housing, an upper part (10) of the housing supporting the flange (2), and a driving means (11) which rotates the rotor shafts (6). Wherein each of the rotor shafts (6) supports each of rotary pump action structure parts (7), and each of the rotary pump action structure parts (7) face each of stationary pump action structure part (8). Then all of the gas inlet openings (4) are inside of the flange (2), and the flange (2) is arranged at the upper part (10) of the common housing. COPYRIGHT: (C)2006,JPO&NCIPI
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