发明名称 |
METHODS AND APPARATUS FOR ADJUSTING BELT TENSION OF A SCRUBBER |
摘要 |
In a first aspect, a method is provided for adjusting tension of a belt of a semiconductor device manufacturing tool. The first method includes (1) coupling an elastic element between a pulley coupled to the belt and a fixed surface of the semiconductor device manufacturing tool; and (2) compressing or decompressing the elastic element so as to adjust at least one of a height and a tilt of the pulley and a tension of the belt coupled to the pulley. Numerous other aspects are provided. |
申请公布号 |
WO2006020688(A2) |
申请公布日期 |
2006.02.23 |
申请号 |
WO2005US28378 |
申请日期 |
2005.08.10 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
YUDOVSKY, JOSEPH;NGO, TAI, T.;COULIN, ANNE-DOUCE |
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