Micromechanically-produced paramagnetic gas sensor for measuring oxygen concentrations has a capsule of the type used in a known inclination- and acceleration-sensor

摘要

A paramagnetic sensor for measuring oxygen concentrations in gases (10) has (A) a gas-uptake capsule (1) in which are positioned a heating element (2) and a flow- and temperature-sensor (3, 4) apprehending convection flow (5) of the gas; and (B) a magnet (11) creating a penetrating magnetic field (6) asymmetrically to the capsule (1).