SEMICONDUCTOR MANUFACTURING APPARATUS HAVING A TIMER TO CONTROL THE SUPPLY OF REACTION GAS,申请号KR20040065605-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING APPARATUS HAVING A TIMER TO CONTROL THE SUPPLY OF REACTION GAS
摘要
申请公布号	KR20060017092(A)	申请公布日期	2006.02.23
申请号	KR20040065605	申请日期	2004.08.19
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, SANG YONG;KWAK, SE KEUN;KWEON, YOUNG DO
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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