| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve a solar cell manufacturing apparatus such that an XY table, a laser generator and an optical system member exhibit high precision and exact laser scribing can be carried out. <P>SOLUTION: The solar cell manufacturing apparatus 1 comprises an XY table 2, four laser generators 3a, 3b, 3c and 3d, optical system members 5 and an air conditioning chamber 6. Each of laser generators 3a, 3b, 3c, 3d is a fiber laser device. Each of laser generators 3a, 3b, 3c, 3d and the optical system members are unitized. Units 26a, 26b, 26c and 26d are fixed to a mount 20 provided above the XY table 2, and the laser generators 3a, 3b, 3c and 3d and the optical system members 5 are entirely located above the XY table 2. The XY table 2, the laser generator 3, and the optical system members 5 are entirely installed in the air conditioning chamber 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
