| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer having reduced wavelength dependency or polarization dependency. SOLUTION: This interferometer has a beam splitter for branching incident light into reflected light and transmitted light, a fixed mirror for reflecting either of the reflected light and the transmitted light toward the beam splitter, and a moving mirror for reflecting the other of the reflected light and the transmitted light toward the beam splitter. The interferometer is acquired by improving an interferometer wherein each returned light reflected by the fixed mirror and the moving mirror is piled by the beam splitter. The device is characterized as follows: in the beam splitter, linear reflecting surfaces and linear transmitting surfaces are arranged alternately; the incident light is branched into a beam shape wherein light intensity is distributed linearly by the beam splitter; and the array direction of the light intensity of the returned light is different from the array direction of the linear reflecting surfaces and the linear transmitting surfaces in the beam splitter. COPYRIGHT: (C)2006,JPO&NCIPI
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