发明名称 |
Vaporizer, various apparatuses including the same and method of vaporization |
摘要 |
A vaporizer that does not cause clogging or other failure, permits long-term use and enables stable supply of raw materials to a reaction section. In particular, a vaporizer which not only enables continuous and stable supply of raw materials adjusted to stoichiometric ratios but also exerts an effect of reducing the amount of carbon residue in a formed film; and a relevant disperser, film formation unit, method of vaporization, method of dispersion and method of film formation. The vaporizer may be one comprising vaporizing a raw material solution contained in a carrier gas characterized in that elements for causing the carrier gas before containing the raw material solution to contain the solvent of the raw material solution is disposed therein.
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申请公布号 |
US2006037539(A1) |
申请公布日期 |
2006.02.23 |
申请号 |
US20050515888 |
申请日期 |
2005.07.05 |
申请人 |
TODA MASAYUKI;UMEDA MASARU |
发明人 |
TODA MASAYUKI;UMEDA MASARU |
分类号 |
C23C16/00;C23C16/40;C23C16/448;H01L21/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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