| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for inspection of a circuit board capable of performing a highly reliable inspection even for the objective circuit board having electrodes with minute pitch. SOLUTION: The inspection device is constituted as follows: a relay pin unit is provided with an intermediate retaining plate 36, a first support pin 33 arranged between a first insulation plate 34 and the intermediate retaining pin 36, and a second support pin 37 arranged between a second insulation plate 35 and the intermediate retaining plate 36; a first abutting support position of the first support pin 33 to the intermediate retaining plate 36, and the second abutting support position of the second support pin 37 to the intermediate retaining plate 36 are projected in a thickness direction of the intermediate retaining plate 36 on the projection surface of the intermediate retaining plate and arranged at the differen positions; and the relay board 29 is provided for relaying the electric connection of the pitch conversion board 23 and the inspection circuit board 1. COPYRIGHT: (C)2006,JPO&NCIPI
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