METHOD AND SYSTEM FOR ION BEAM CONTAINMENT IN AN ION BEAM GUIDE,申请号EP20040752973-传众专利搜索

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发明名称	METHOD AND SYSTEM FOR ION BEAM CONTAINMENT IN AN ION BEAM GUIDE
摘要
申请公布号	EP1627411(A2)	申请公布日期	2006.02.22
申请号	EP20040752973	申请日期	2004.05.21
申请人	AXCELIS TECHNOLOGIES, INC.	发明人	YE, JOHN ZHENG;BENVENISTE, VICTOR;CRISTOFORO, MICHAEL
分类号	H01J37/05;H01J37/147;H01J37/317;H01J37/32;(IPC1-7):H01J37/05	主分类号	H01J37/05
代理机构		代理人
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