| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat-resistant polymer film and its production method. SOLUTION: The polymer film contains inorganic particles, has a glass transition temperature and a thermal distortion temperature both higher by at least 2°C than those of a polymer film not containing the inorganic particles, and has a thermal expansion coefficient smaller by at least 20 ppm/°C than that of the polymer film not containing the inorganic particles. Before the incorporation of the inorganic particles into the film, the inorganic particles and/or the polymer is subjected to a heat treatment at 50-500°C and/or to a vacuum treatment under 0.133-13.3 Pa (0.001-0.1 Torr). COPYRIGHT: (C)2005,JPO&NCIPI
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