发明名称 Cu LINE FORMATION METHOD OF SEMICONDUCTOR DEVICE
摘要 The method for forming the copper wiring of the semiconductor device includes the steps of forming a first copper wiring on a semiconductor substrate having a predetermined low structure, implanting magnesium ion on the first copper wiring, forming a magnesium oxide layer on the first copper wiring by thermal treating the first copper wiring, and forming a second copper wiring on the magnesium oxide layer.
申请公布号 KR100552812(B1) 申请公布日期 2006.02.22
申请号 KR20030101826 申请日期 2003.12.31
申请人 发明人
分类号 H01L21/28;H01L21/4763;H01L21/768;H01L23/48;H01L23/52;H01L23/532 主分类号 H01L21/28
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