| 摘要 |
PROBLEM TO BE SOLVED: To improve conveyance efficiency of a material by preventing a material having weakness for vibration such as a base from being vibrated. SOLUTION: In these conveyance devices 5, 31 provided with running carrier parts 7, 32 running on a conveyance line 9 for the material having weakness for vibration such as the base 1 and material support parts 8, 33 attached to the running carrier parts 7, 32 and supporting the material 1, vibration proof mechanisms 22, 37, 38 absorbing vibration in three directions including vertical direction of a carrier, the direction of running of the carrier, and carrier running orthogonal direction which becomes the direction orthogonal for its running direction are provided among the running carrier parts 7, 32 and the material support parts 8, 33. COPYRIGHT: (C)2005,JPO&NCIPI
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