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发明名称
Method for fabricating the impurity region in semiconductor device
摘要
申请公布号
KR100552851(B1)
申请公布日期
2006.02.22
申请号
KR20030094759
申请日期
2003.12.22
申请人
发明人
分类号
H01L21/265
主分类号
H01L21/265
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代理人
主权项
地址
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