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发明名称
THE CONTAINER FOR USE IN MANUFACTURING A SEMICONDUCTOR AND A METHOD THEREOF
摘要
申请公布号
KR100554044(B1)
申请公布日期
2006.02.22
申请号
KR19990006817
申请日期
1999.03.02
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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