发明名称 Method for fabricating a three-dimensional capacitor
摘要 A capacitor and a method of fabricating the capacitor are provided herein. The capacitor can be formed by forming two or more dielectric layers and a lower electrode, wherein at least one of the two or more dielectric layers is formed before the lower electrode is formed.
申请公布号 EP1628328(A2) 申请公布日期 2006.02.22
申请号 EP20050255060 申请日期 2005.08.16
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JUNG-HYUN;PARK, SUNG-HO;CHOI, SANG-JUN
分类号 H01L21/02 主分类号 H01L21/02
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