INERT GAS RECOVERY ANNEALING OF HYDROGEN-DAMAGED FERROELECTRIC FILMS,申请号KR20017006018-传众专利搜索

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发明名称	INERT GAS RECOVERY ANNEALING OF HYDROGEN-DAMAGED FERROELECTRIC FILMS
摘要
申请公布号	KR100553230(B1)	申请公布日期	2006.02.22
申请号	KR20017006018	申请日期	2001.05.12
申请人		发明人
分类号	H01L27/04	主分类号	H01L27/04
代理机构		代理人
主权项
地址

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