| 发明名称 |
A METHOD AND SYSTEM FOR CONTROLLING THE CHEMICAL MECHANICAL POLISHING BY USING A SENSOR SIGNAL OF A PAD CONDITIONER |
| 摘要 |
In a system and a method, according to the present invention, a sensor signal, such as a motor current signal, from a drive assembly of a pad conditioning system is used to estimate the status of one or more consumables (113) in a CMP system. |
| 申请公布号 |
EP1626839(A1) |
申请公布日期 |
2006.02.22 |
| 申请号 |
EP20040715012 |
申请日期 |
2004.02.26 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
KRAMER, JENS;STOECKGEN, UWE, GUNTER;KUNATH, JENS |
| 分类号 |
B24B49/10;B24B53/007;B24B53/017 |
主分类号 |
B24B49/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
