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发明名称
SYSTEM AND METHOD FOR CHARACTERIZING LITHOGRAPHY EFFECTS ON A WAFER
摘要
申请公布号
EP1627258(A2)
申请公布日期
2006.02.22
申请号
EP20040729689
申请日期
2004.04.27
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
ZIGER, DAVID;QIAN, STEVEN
分类号
G03F7/20;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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