| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm valve capable of preventing a membrane part of a diaphragm from being deformed even when using high pressure fluid to control supply of high pressure fluid. SOLUTION: This diaphragm valve 1 is provided with a back-up 40 integrated with a valve element part 21 of the diaphragm 20 and coming into face-contact with the membrane part 22 of the diaphragm valve element 20 always. The back-up 40 is provided with a rubber member 41 in a contact part with the membrane part 22 of the diaphragm valve element 20 and a resin-made holding member 42 for holding the rubber member 41 from an actuator 50 side. A shape of a contact face with the membrane part 22 of the rubber member 41 is formed in such a way that contact area of the rubber member 41 and the membrane part 22 becomes the maximum when closing the valve. COPYRIGHT: (C)2006,JPO&NCIPI
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