| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration removing system capable of ensuring safety in operation of a vacuum pump and keeping a position of a vacuum chamber at a fixed position. SOLUTION: This vibration removing system of the vacuum chamber is provided with the vacuum chamber 11 put on a vibration removing device 21, a fixing base 32 for fixing the vacuum pump 31, an elastic member 35 for connecting the vacuum chamber 11 with the vacuum pump 31, an actuator 34 for adjusting a relative position of the vacuum chamber 11 for the fixing base 32, a position detection means 37 for detecting amount of positional deviation of the vacuum chamber 11 for the fixing base 32, and a control part 33 for controlling the actuator 34 based on output from the position detection means 37. The fixing base 32 is fixed on an installation floor G. COPYRIGHT: (C)2006,JPO&NCIPI
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