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发明名称
THE METHOD FOR REMOVING THE RESIDUE IN SEMICONDUCTOR FILM-DEPOSITION PROCESS
摘要
申请公布号
KR20060016476(A)
申请公布日期
2006.02.22
申请号
KR20040064936
申请日期
2004.08.18
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
JOENG, SEI GWANG
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
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地址
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