Contact exposure apparatus having means for defining gap between mask and work,申请号KR20000063251-传众专利搜索

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发明名称	Contact exposure apparatus having means for defining gap between mask and work
摘要
申请公布号	KR100554698(B1)	申请公布日期	2006.02.22
申请号	KR20000063251	申请日期	2000.10.26
申请人		发明人
分类号	H01L21/027;G03F7/20;H05K1/00;H05K3/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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