发明名称 WASTE-GAS SHARING VALVE FOR PREVENTION OF ABSORPTION POWDER
摘要 A waste-gas sharing valve for preventing absorption of powder is provided to prevent a stacking effect of powder within a valve by forming a rotary tube with a shape of sigmoid. An inlet(110) is formed at an upper part of a rotary tube(100) in order to receive fluid. An outlet is formed at a lower part of the rotary tube in order to discharge the fluid. A driving unit(200) applies rotatory power to a vertical shaft of the rotary tube. A rotatory power transmission unit(300) transmits the rotatory power of the driving unit to the rotary tube. A lower plate(400) includes two or more exhaust holes(410) to be connected with the outlet when the rotary tube is rotated.
申请公布号 KR100674084(B1) 申请公布日期 2007.01.29
申请号 KR20050130649 申请日期 2005.12.27
申请人 STS. CO., LTD. 发明人 KIM, BAE JIN
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址