| 发明名称 |
Substrate carrier with a textured membrane |
| 摘要 |
A carrier head for a chemical mechanical polishing apparatus includes a membrane with an exterior grooved surface for improved chemical mechanical polishing. The exterior grooved surface provides a path for the flow of air from the portion between the membrane and a substrate.
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| 申请公布号 |
US7001245(B2) |
申请公布日期 |
2006.02.21 |
| 申请号 |
US20030384247 |
申请日期 |
2003.03.07 |
| 申请人 |
APPLIED MATERIALS INC. |
发明人 |
CHEN HUNG CHIH |
| 分类号 |
B24B49/00;B24B37/04;B24B51/00;H01L21/302 |
主分类号 |
B24B49/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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