发明名称 Manufacturing method for a plurality of manufacturing lots
摘要 As a basic managing pattern, each manufacturing lot containing at least one workpiece is designated as a main objective to be managed. An appropriate number of similar type manufacturing lots containing workpieces having the same work conditions in at least one work step are loaded on a carrier. Then, the carrier is transported to a batch apparatus that performs simultaneous processing or machining operation applied to the workpieces or to an apparatus that brings the workpieces into an in-process work step under the same conditions, so as to cause the workpieces contained in respective similar type manufacturing lots to pass along a plurality of manufacturing process flows. Alternatively, an appropriate number of different type manufacturing lots containing workpieces having different work conditions are loaded on a carrier. Then, the carrier is transported to an apparatus that is capable of simultaneously bringing the workpieces into in-process work steps of different conditions, so as to cause the workpieces contained in respective different type manufacturing lots to pass along a plurality of manufacturing process flows.
申请公布号 US7003368(B2) 申请公布日期 2006.02.21
申请号 US20040809153 申请日期 2004.03.25
申请人 DENSO CORPORATION 发明人 KOIKE MANABU;KUROYANAGI MASAAKI
分类号 G05B19/418;H01L21/02;H01L21/677;H01L21/68 主分类号 G05B19/418
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