Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article

摘要

The present invention provides a curved honeycomb article having a first face, a second face, and a plurality of channels formed from the first face to the second face, each channel having a channel axis, the curved honeycomb article having a width of at least about 15 cm in at least one direction in the plane normal to a channel axis at its geometrical center, each channel having a virtual channel extension associated therewith, the virtual channel extensions defining a convergence area substantially smaller than the occluded area of the curved honeycomb article. Methods for making the curved honeycomb article and apparati using the curved honeycomb article are also disclosed.