Ion implantation apparatus and Method for ion implantation,申请号KR20030101921-传众专利搜索

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发明名称	Ion implantation apparatus and Method for ion implantation
摘要
申请公布号	KR100552850(B1)	申请公布日期	2006.02.21
申请号	KR20030101921	申请日期	2003.12.31
申请人		发明人
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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