发明名称 Method for fabricating a tapered optical coupling into a slab waveguide
摘要 A three dimensional adiabatic taper provides a funnel for light to be coupled into high index material. The taper is formed by shadow deposition or sputtering from polysilicon, which can be used to match the refractive index of waveguiding material to which the taper is optically coupled. When designed with the correct shape and adequate smoothness, such tapers form efficient waveguide couplers. Once the light has been coupled through the adiabatic coupler into an index guide on a wafer or chip, an integral design of the transition between the index guide and photonic crystal ensures low loss coupling with a minimum of diffraction and back reflection.
申请公布号 US7001789(B2) 申请公布日期 2006.02.21
申请号 US20050134008 申请日期 2005.05.20
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 ALDIBI ALI;SCHERER AXEL
分类号 H01L21/00;G02B6/122;G02B6/26 主分类号 H01L21/00
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