摘要 |
PROBLEM TO BE SOLVED: To provide a boron nitride nanotube introduced with a fluorine atom, which can be used in the field of electronic devices; and also to provide the manufacturing method of the same. SOLUTION: The boron nitride nanotube introduced with a fluorine atom is synthesized by heating magnesium chloride, a base material, in the flow of ammonia gas and boron trifluoride gas for 1 hour at 880-950°C. This nanotube has a length of severalμm, a diameter of several ten nm. The nanotube has the composition of BN<SB>1-x</SB>F<SB>x</SB>(0.02≤x≤0.08). Since fluorine is a conductive impurity, the nanotube can be used for various electronic devices. COPYRIGHT: (C)2007,JPO&INPIT
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