发明名称 |
Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter |
摘要 |
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the piezoelectric thin-film therebetween. The stiffness of at least one of the lower and upper electrodes is higher than that of the piezoelectric thin-film.
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申请公布号 |
US7002437(B2) |
申请公布日期 |
2006.02.21 |
申请号 |
US20030456173 |
申请日期 |
2003.06.06 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
TAKEUCHI MASAKI;YAMADA HAJIME;KAWAMURA HIDEKI;NAKAMURA DAISUKE;YOSHINO YUKIO |
分类号 |
H03H9/15;H03H9/00;H03H9/02;H03H9/17;H03H9/54;H03H9/56;H03H9/58;H03H9/70 |
主分类号 |
H03H9/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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