发明名称 Method of manufacturing semi conductor device
摘要 A fabrication method of a semiconductor device which has on the same semiconductor layer a transistor with a different high voltage gate as well as a high voltage drain and an MNOS memory transistor.
申请公布号 US7001812(B2) 申请公布日期 2006.02.21
申请号 US20040961768 申请日期 2004.10.07
申请人 SEIKO EPSON CORPORATION 发明人 NODA TAKAFUMI;INOUE SUSUMU;TSUYUKI MASAHIKO;EBINA AKIHIKO
分类号 H01L21/283;H01L21/8234;H01L21/76;H01L21/8238;H01L21/8247;H01L27/088;H01L27/092;H01L27/10;H01L27/105;H01L27/115;H01L29/423;H01L29/49;H01L29/788;H01L29/792 主分类号 H01L21/283
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