发明名称 Semiconductor device having wiring patterns and dummy patterns covered with insulating layer
摘要 A semiconductor device including a semiconductor substrate having a grid-line area and a chip area, the chip area having a circuit area and a dummy area surrounding the circuit area, circuit patterns formed on the substrate in the circuit area, a first dummy pattern which is formed of the same material as the circuit pattern, formed in the dummy area, the dummy pattern encompassing the circuit area, a first insulating layer formed on an entire surface of the semiconductor substrate, a second insulating layer formed only on the first insulating layer which is formed on the semiconductor substrate and on the circuit patterns; and a third insulating layer formed on the exposed first insulating layer and the second insulating layer.
申请公布号 US7002256(B1) 申请公布日期 2006.02.21
申请号 US20000625178 申请日期 2000.07.25
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 NAKAMURA HIROKI
分类号 H01L23/48;H01L23/52;H01L21/3205;H01L21/768;H01L23/00;H01L23/522;H01L23/528;H01L23/58 主分类号 H01L23/48
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