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发明名称
Two-axis actuator with large-area stage
摘要
申请公布号
KR100552687(B1)
申请公布日期
2006.02.20
申请号
KR20030058286
申请日期
2003.08.22
申请人
发明人
分类号
H02N1/06;H02N1/00
主分类号
H02N1/06
代理机构
代理人
主权项
地址
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