| 摘要 |
FIELD: engineering of optical controlling-measuring equipment, possible use for measuring height of steps, produced by any method in homogeneous material or in any random multi-layer structure. ^ SUBSTANCE: method includes measuring ellipsometric parameters separately for light rays, reflected from areas on both sides of step (with utilization for steps in multi-layer structures of additional measurements in other environment, different from air), and for summed beam, received by combination of aforementioned two beams with match of fronts of these beams after insertion into them of controlled change of amplitude and phase, with following computation of step height with their utilization in accordance to special algorithm. ^ EFFECT: expanded nomenclature of steps, value of which can possibly be controlled by means of standard ellipsometers. ^ 2 dwg |
