| 摘要 |
The method and device offered relate to the vacuum deposition of coatings by thermal evaporation of metals and alloys. The offered device (fig.1) contains a melting crucible (1) with molten material (liquid metal) (2), one or several crucibles (3) of evaporation device (4) in a vacuum chamber 5, a heated liquid-metal pipe (6), connecting the said melting crucible to the said evaporation crucibles through a magnetohydrodynamic (MHD) circuit (7) of static melt pressure. The circuit (7) is provided with an MHD pump (8) and incorporates the liquid-metal pipe (6) sectors, which are adjacent to the MHD pump, heated liquid-metal pipes (9, 10 and 11), a heated reservoir (13), connected to the liquid-metal pipe (6) sector before the MHD pipe through the liquid-metal pipe (11) and to an expander (12), installed in the said pipe (9), through the liquid-metal pipe (10). Spaces above the melt in the expander and reservoir are interlinked with a pipe (14), connected to a vacuum pumping system (not shown). Two electrical sensors (15) of the melt level (L) are installed in the expander. The melt level in the expander and in the evaporator is ?h high relative the melt level L0 in the MHD circuit reservoir, i.e. the MHD pump should provide pressure ?h. The present technical solution allows increasing the stability of metals and alloys evaporation in long-run processes and thus increasing the productivity. The solution may be used for the deposition of various functional coatings in electronics, metallurgy, mechanical engineering. It is possible to evaporate zinc, magnesium, cadmium, lithium, zinc-magnesium alloy with this method.
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