| 摘要 |
FIELD: piezo engineering, possible use for making high frequency quartz resonators. ^ SUBSTANCE: method for making high frequency filter quartz resonator includes operation of applying onto crystalline element yx1/+35° (AT-) cut of thin-film electrodes in accordance to method of thermo-vacuum silver evaporation with sub-layer of nichrome, mounting crystalline element in crystal holder, thermo-training cycle, adjustment of frequency by ion-plasma etching of electrodes with control over frequency value and pressurization inside the body. Thin-film electrodes in form of ellipse on both sides of crystalline element are made by photolithography method, while electrodes are oriented relatively to crystallographic axes by means of shapes of etching of quartz crystalline element in area of inverse mesa structure, while diameters of element are oriented by crystallographic axes of crystalline element with yx1/+35° (AT-) cut. Largest diameter of ellipse is directed in parallel to etching shape, to match its length along crystallographic axis XX', while the least diameter is oriented perpendicularly to ZZ' axis. ^ EFFECT: increased precision of manufacture of quartz resonator piezo element, decreased alternation of dynamic parameter values, better spectral characteristics of quartz resonators. ^ 3 dwg |
