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发明名称
液体加热设备、清洗设备及清洗方法
摘要
本发明旨在:提供一种于不污染纯水或清洗液之情况下,有效的加热之液体加热设备、液体加热方法以及利用该加热方法之清洗设备及清洗方法。从贮存有纯水之密闭状态的纯水槽(5)的顶部、侧部以及底部中之至少一个部份照射微波,由此非接触的加热纯水。
申请公布号
TW200607015
申请公布日期
2006.02.16
申请号
TW094122431
申请日期
2005.07.01
申请人
松下电器产业股份有限公司
发明人
三由裕一;菅野恒;佐藤泰夫
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
陈长文
主权项
地址
日本
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