| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable slit arrangement capable of driving many blades with less number of actuators. <P>SOLUTION: A variable slit arrangement 101 for forming slit-like illumination light EL comprises a first light shielding part 10 which comprises a plurality of blades 30 to define one major side L of the illumination light EL, and a second light shielding part which defines the other major side L of the illumination light EL. The first light shielding part 10 comprises a plurality of rods 72 connected to a plurality of blades 30, and a rod position regulating part 52 which can be engaged with each of a plurality of rods 72 and moves in the direction almost parallel to one major side L of the illumination light EL so that each of the plurality of blades 30 is sequentially pressed/pulled in the direction almost orthogonal to one major side L of illumination light. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
