| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device which can remove foreign matters without dropping efficiency of exposure work. <P>SOLUTION: A foreign matter removing means 300 for removing foreign matters stuck to the surface of an exposure mask 201 is provided with a moving means 304 which can move along the exposure mask 201; and a cleaning member 301 which is installed in the moving means 304, removes the foreign matters stuck to the surface of the exposure mask 201, and has elasticity. The moving means 304 is caused to move along the exposure mask 201 while the cleaning member 301 is pressed onto the surface of the exposure mask 201. Thus, the foreign matters stuck to the surface of the exposure mask 201 are removed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
