| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electro-optical device, which allows self-luminescent elements to be efficiently formed on a large-sized substrate having a plurality of small-sized substrates arranged in a plane thereon, without enlarging a manufacturing apparatus, the electro-optical device, and an electronic apparatus. <P>SOLUTION: When an organic EL display device 1 having a plurality of small-sized substrates 2 stick to each other is manufactured, processes requiring laser annealing and photolithography techniques, such as a process of forming TFTs 123 and 124 and a process of forming pixel electrode 111, are performed before a process of sticking the small-sized substrates 2 and the large-sized substrate 4 to each other, and organic EL elements are formed by an ink jet method after the sticking process. The small-sized substrates 2 are covered with a protection film 6 until before the organic EL display elements are formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
