| 摘要 |
PROBLEM TO BE SOLVED: To realize a highly stable vibrator by providing a void vibrator mass-production method by which an electrode film is not formed on a crystal. SOLUTION: First of all, a crystal plate recessed holding portion and an electrode recess are formed inside a silicon chip. A gap electrode and a drawing electrode are then formed inside the silicon chip through an insulating layer, and a front surface of a recess along the outer periphery of the silicon chip is covered with a gold thin film. A crystal plate recessed holding part is formed inside the silicon chip as another wafer constructing a bonding wafer. An electrical connection field-through and a crystal plate recessed holding part are then formed from a rear surface of the wafer. A projecting portion and a bottom electrode recess are formed along the outer periphery of the chip, and a gap electrode and a drawing electrode are then formed inside the chip through an insulating layer. The front surface of the projecting portion along the outer periphery of the chip is covered with a gold thin film, and cleaning and thermal aging are performed on both the wafers. The recess on the final one wafer and the projecting portion on the other wafer are separated into respective chips after performing tongue-and-groove bonding thereon, so that the highly stable crystal vibrator is obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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