SOLID STATE IMAGING DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To raise the condensing efficiency of obliquely incident lights, reduce the smear components and suppress the crosstalk. SOLUTION: The solid state imaging device 12 comprises an optical guide 21 tapered to increase its cross section upward on a photoelectric converter element 12 through an insulation film 16 and an etching stopper film 17 laid on the element 12, and a condensing lens 22 having a structure integrated with the optical guide 21 having a higher refractive index than a layer insulation film 20. The lens 22 is made of the same material as that of the optical wave guide 21. COPYRIGHT: (C)2006,JPO&NCIPI