| 摘要 |
A piezoelectric member element including a piezoelectric member layer and a pair of electrode layers sandwiching the piezoelectric member layer, wherein at least three layers, which are directed in a preferential orientation to the (110) plane on the (100) plane of Si, are accumulated and the above-described at least three layers include the above-described piezoelectric member layer and one of the above-described pair of electrode layers.
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