发明名称 Methods for forming an undercut region and electronic devices incorporating the same
摘要 An electronic device having a substrate structure having an undercut region is provided and further included is a method for forming an undercut region of a substrate structure. The method includes forming a patterned protective layer over a first electrode. The method also includes forming the substrate structure over the patterned protective layer. An opening within the substrate structure overlies an exposed portion of the substrate structure. The method further includes removing the exposed portion of the patterned protective layer, thereby exposing a portion of the first electrode and forming an undercut region of the substrate structure. The method still further includes depositing a liquid over the first electrode after removing the exposed portion of the patterned protective layer, and solidifying the liquid to form a solid layer.
申请公布号 US2006035469(A1) 申请公布日期 2006.02.16
申请号 US20040915578 申请日期 2004.08.10
申请人 TRUONG NUGENT;MACPHERSON CHARLES D 发明人 TRUONG NUGENT;MACPHERSON CHARLES D.
分类号 H01L21/302 主分类号 H01L21/302
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