| 发明名称 |
HOCHREINE ZUSAMMENSETZUNG FÜR OFENTEILE |
| 摘要 |
<p>A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes heat treatment of the carbon fiber and the components.</p> |
| 申请公布号 |
DE69634562(T2) |
申请公布日期 |
2006.02.16 |
| 申请号 |
DE1996634562T |
申请日期 |
1996.02.22 |
| 申请人 |
HITCO CARBON COMPOSITES, INC. |
发明人 |
METTER, H. |
| 分类号 |
B32B9/00;B05D3/02;B32B9/04;C04B35/83;C30B15/00;C30B15/10;C30B15/14;C30B21/06;C30B35/00;D01F11/12 |
主分类号 |
B32B9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
