| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezo-electric pump, and a method for adjusting its performance, in which mass-production performance is excellent, and in which pump performance can be easily changed. SOLUTION: This piezo-electric pump comprises a piezo-electric vibrator 20, a housing 11 to liquid-tightly hold the piezo-electric vibrator 20, a pair of openings 14A and 14B for passages formed in the housing 11, and a pair of check valves 43A and 43B of different flow directions installed on the openings 14A and 14B for passages. Between the housing 11 and the piezo-electric vibrator 20, an insert 30 having a volume deciding recess 31 to form a changeable volume chamber 13 to the piezo-electric vibrator 20, and a pair of communication holes 32A and 32B corresponding to the openings 14A and 14B for passages is provided. On the insert 30 and the housing 11, positioning irregularities 34A, 34B, 18b, and 19b are formed to be engaged with each other to match the positions of the communication holes 32A and 32B with the positions of the openings 14A and 14B for passages. COPYRIGHT: (C)2006,JPO&NCIPI
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