| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for a circuit board, capable of performing high-reliability electrical inspection of the circuit board, even if the inspected circuit board has minute electrodes, of minute-pitch and hardly needing correction of the positional shift of an isotropic electroconductive sheet, enabling smooth inspection work. SOLUTION: A relay pin unit 31 has an intermediate holding plate 36; a first support pin 33 disposed between a first insulation plate 34 and the intermediate holding plate 36; and a second support pin 37 disposed between a second insulation plate 35 and the intermediate holding plate 36. A first abutment support position of the first support pin to the intermediate holding plate and a second abutment support position of the second support pin to the intermediate holding plate are disposed at different positions in an intermediate holding plate projection plane, wherein they are projected in the thickness direction of the intermediate holding plate. A first anisotropic electroconductive sheet 22 is formed of an elastomer sheet, wherein electroconductive particles are arranged in the thickness direction and are distributed uniformly in the surface direction. COPYRIGHT: (C)2006,JPO&NCIPI
|
