| 摘要 |
A system for treating perfluorocarbon gases is provided to pass through an arc part of a high temperature plasma although a perfluorocarbon gas to be treated is supplied in a high flow amount and to make it possible to collect even byproducts of fine particles that have not been melted into water. A system for treating perfluorocarbon gases comprises a plasma treatment chamber(100), a water treatment chamber, and a wet type electrostatic precipitator. The plasma treatment chamber includes: a housing(110); two annular electrodes(111a,111b) vertically disposed on an inner peripheral surface of the housing such that the annular electrodes are spaced from each other; a plate shaped electrode(113) disposed on a top part of the housing such that the plate shaped electrode crosses the housing; a perfluorocarbon gas feeding line(120) connected to a portion of the housing between the two annular electrodes; a nitrogen gas feeding line(140) connected to a portion of the housing between the upper annular electrode(111a) and the plate shaped electrode; and a power supply unit(130a) connected to the upper annular electrode(111a) and the plate shaped electrode to generate a high voltage and a low electric current having high stability, and a power supply unit(130b) connected to the lower annular electrode(111b) and the plate shaped electrode to generate a low voltage and a high current having high power.
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